Micro Electro Mechanical Systems (MEMS)/Micro Opto Mechanical Systems (MOMS)

  • Introduction to Micro machining by lasers
  • Laser Sources
  • Optical Systems for micromachining
  • Interaction with laser radiation with matter
  • Laser micro shaping of micromechanical components
  • Laser assisted thin films processing
  • Laser technology for micro-optical components fabrication
  • Laser technology for fiber-optical components fabrication
  • Laser assisted micro technology for photonics material processing
  • New trends in laser assisted micro technology

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